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Introduction to Semiconductor Process 1

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  • Week 1 Overview of MOSFET theory
  • Week 2 CMOS Process Integration
  • Week 3 Cleanroom, RCA Cleaning Crystal Growth
  • Week 4 Diffusion & Doping
  • Week 5 Oxidation
  • Week 6 Ion Implantation
  • Week 7 Lithography
  • Week 8 EUV Lithography