Introduction to the Modern Nanotechnology

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The basics of physics and technology of nanomaterials and nanosystems are overviewed in the course. The terminology and notions are introduced. The changes in the main properties of semiconductors and metals due to decrease of their size are discussed towards the electronic and optoelectronic applications and modern compound semiconductor materials. Starting from the objects description and mail physical properties peculiarities we move to basics of material and device nanofabrication, ending with nanosystem characterization techniques. Fabrication nanotechnology of the microwave compound semiconductor heterostructure devices for electronics and photonics are outlined.