Fundamentals of micro and nanofabrication

Week 1:Introduction to micro-fabricationWeek 2: SubstrateWeek 3: Cleaning
Week 4: Additive processing: DopingWeek 5: Additive processing: Native Films
Week 6: Additive processing: CVD
Week 7: Additive processing: PVD
Week 8: Lithography 1
Week 9: Lithography 2
Week 10: Subtractive Process: Wet EtchingWeek 11: Subtractive Process: Dry Etching
Week 12: CMP and Packaging