Vacuum Systems and Technology

ALUMNOS MATRICULADOS
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    Vacuum technology is key to our high-tech society. It is is used for a large number of technical processes and products, including computer chips, nanostructures, microelectronic coatings and components as well as chemical and biological techniques.

    In this engineering course, you will get a comprehensive overview of the construction and working principles of vacuum devices and systems to help you better design materials and processes .

    Syllabus

    Section 1. Vacuum theory

    • Vacuum application. Introducing on molecular-kinetic theory of gases
    • Molecular-kinetic theory of gases
    • Sorption phenomena in vacuum
    • Condensation and evaporation
    • Physical processes in vacuum

    Section 2. Mechanical means of obtaining a vacuum

    • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 1
    • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 2
    • Turbine and diffusion pumps. Construction, working principles and characteristics
    • Ejector pump. Vacuum traps. Construction, working principles and characteristics

    Section 3. Physical-chemical means of obtaining a vacuum

    • Ion and ion-getter pumps. Construction, working principles and characteristics
    • Sublimation and sputter ion pumps. Construction, working principle, characteristics
    • Sorption and condensation pumps. Construction, working principles and characteristics 

    Section 4. Methods of pressure measurement

    • Methods of total pressure measurement. Aneroid and hydrostatic vacuum gauges
    • Methods of total pressure measurement. Thermal vacuum gauges
    • Methods of total pressure measurement. Ionization vacuum gauges
    • Methods of partial pressure measurement. Type of analyzers and traps
    • Methods of partial pressure measurement. Mass-spectrometers

    Section 5. Constructional elements of vacuum systems

    • Valves and gates. Construction, working principle
    • Leek valves. Construction, working principle
    • Vacuum feedthroughs
    • Methods of leak detection

    Section 6. Construction principles of vacuum systems

    • Calculation of vacuum systems to select of vacuum pumps
    • Vacuum systems with diffusion and turbine pumps
    • Vacuum systems with ion and condensation pumps
    • Type of sealing

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    COMUNIDAD MOOC IR AL CURSO

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    • GRATIS
    • 28-02-2017FECHA INICIO
    • National Research Nuclear University MEPhI
    • Valikov A. Roman

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